JPH0346501Y2 - - Google Patents
Info
- Publication number
- JPH0346501Y2 JPH0346501Y2 JP1987114528U JP11452887U JPH0346501Y2 JP H0346501 Y2 JPH0346501 Y2 JP H0346501Y2 JP 1987114528 U JP1987114528 U JP 1987114528U JP 11452887 U JP11452887 U JP 11452887U JP H0346501 Y2 JPH0346501 Y2 JP H0346501Y2
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- light
- wafer
- epi
- oblique
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005286 illumination Methods 0.000 claims description 73
- 235000012431 wafers Nutrition 0.000 description 42
- 238000001514 detection method Methods 0.000 description 17
- 230000002950 deficient Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005453 pelletization Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987114528U JPH0346501Y2 (en]) | 1987-07-28 | 1987-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987114528U JPH0346501Y2 (en]) | 1987-07-28 | 1987-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6420731U JPS6420731U (en]) | 1989-02-01 |
| JPH0346501Y2 true JPH0346501Y2 (en]) | 1991-10-01 |
Family
ID=31355361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987114528U Expired JPH0346501Y2 (en]) | 1987-07-28 | 1987-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0346501Y2 (en]) |
-
1987
- 1987-07-28 JP JP1987114528U patent/JPH0346501Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6420731U (en]) | 1989-02-01 |
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